SOLUTIONS MANUAL FOR
SECOND EDITION
Nano- and Micro
Electromechanical
Systems
Fundamentals of Nano
and Microengineering
-----by---
Sergey Edward Lyshevski
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, chapter one
Nanotechnology and Microtechnology (Nano- and Micro-Science, Engineering
and Technology), and Beyond
Homework Problems
l. Explain the difference between nano- and micro- engineering, science, and technology.
2. Provide examples where nano- and micro-science, engineering and technology have been utilized.
3. Where nano- and micr0-~~ie&en~ring~technology, as weU as nanotechnology can be
envisioned to be utilized and commercialized?
4. For any technical paper in nanotechnology (or microtechnology) areas that appeal to you, address
and discuss scientific and societal issues as well as potential positive and possible negative impacts
of the wits reported.
Possible Answers
1) Miao- engineering, science and technology pertains to the scaling down of
traditional electronic and electro-mechanical systems. Nano-engineering
science and technology seeks to create new structures and devices with
operating principals based where quantum effects are the primary descriptors
of behaviors.
2) Micro - engineering, science and technology is already widely applied in
CMOS and other planer semiconductorfabrication technologies. The MEMS
field uses micro-machined structures to perform mechanical tasks. The
application of nano-technology are limited so far. Practical devices are not
available yet but there is much work being done with organic structures l i e
DNA as well as semiconductors like carbon fbllerenes.
3) Probably the first market that will commercializenano-technology is the
computer industry. The industry is already driven by the desire to scale down
devices for Edster computations. At some point, traditional technologies will
reach the limits of scaling. Novel nano-devices are going to be needed to
continue the performance increases in computing.
4) In the paper A Nanoscale Single-Molecule Amulifier and it's Consequences,
Christian Joachim and James Gimzewski explore the I-V characteristics of a
single ikllerene under mechanical stresses. This type of information is
very important to the field of nanotechnology. It is this hndamental
understanding of molecular behavior that is needed to W e r the field. This
research has many positive societal impads also. The continuing
development of semiconductor devices is the driving force behind our
technology oriented societal development.
Re$-- Joacbjm, C and Gimzewski, J. "A W a m s c a k SigbMolecuIe AmpWw and Its
Cuoquences,* Boedhp of theIEEE, vol. 86, na 1, January 1998, pp. 184-190
,l. Explain the difference between nano- and micro-engineering, science, and technology.
The fundamental technical difference between micro-electromechanical systems
(MEMS) and nano-electromechanical systems are the size of the mechanical systems
produced. MEMS are on a micro scale with the order of 1E-6 meters, where as NEMS are
much smaller on the order of 1E-9 meters. As a result of this size difference the physical
laws and science that govern the behavior of these systems differ. In the micro scale
mechanical motion can be described using classical Newtonian mechanics, and electrical
dynamics by Maxwell's equations. When the sizes decrease to nano scale however these
theories break down. On the nano scale motion is governed my quantum theory,
probability and random occurrence and electromagnetism be nano electro mechanics. The
last major difference between these type of systems are the materials they are made from
and processes used to create them. On the micro scale structures are typicly made from
silicon, or metal and are etched in surfaces using the same photolythogerfy techniques
used to make integrated circuits. On the nano scale however devices are not only
inorganic silicon but also biological structures, such as DNA.
2. Provide examples where nano- and micro-science, engineering and technology have been
utilized.
MEM and NEM systems are widely used in many applications today. MEMS are most
common as they can be mass produced and use a variation of existing CMOS technology.
Devices such as pressure sensors, accelerometers, micro motors, pumps, and actuators are
all heavily used. Several of these devices such as the accelerometers are used on
miniature surveillance aircraft. Using the micro motors several companies have produced
hard drives that can hold 20gigabytes of data yet are only the size of a penny. Actuators
are typically used in optical application to move optical elements such as mirrors.
Devices such as high resolution digital projectors have arrays of millions of micro
mirrors that individually move to produce the correct color for each pixel. Nano scale
devices are still in there infancy as the processes to make the devices are not yet
available. Some of the most common nano scale features are transistors, that are on the
order of only 100s of nano meters. Nano engineering is also used to develop cretin
perfumes, as well as drugs in the medical industry.
3. Where nano- and micro-science/engineering/technology,as well as nanotechnology can
be envisioned to be utilized and commercialized?
In the future the applications of these micro and nano systems have great promise. Micro
and nano systems may someday be used to produce entirely new materials. It has been
proven that it is possible to produce materials that have a negative index or refraction at
high E M frequencies. Someday these devices may change the way we manipulate light.
Other applications include smart dust, a proposed idea where small devices the size of a
dust partial have several sensors in them that monitor temperature pressure and several
, other environmental variables. These devices may be able to monitor environments in
inhabitable places. Nano engineering has designed small circular structures called carbon
nano tubes. These nano fabricated tubes are the strongest materials ever made, have
conductive and insolative properties depending on there structure, and have high abortive
and catalytic properties. One day these tubes may be used for everything from advanced
transistors to high strength carbon fibers to make new composite materials with
properties unlike any other material known.
4. For any technical paper in nanotechnology areas that appeal to you, address and discuss
scientific and societal issues as well as potential positive and possible negative impacts or
the results reported.
Title: MEMS-based 14Ghz resolution dynamic optical filter
By: T. Zhou D.O. Lo X,M.-E. Simon, F. Pardo, V.A Aksyuk and D.T. Neilson
47
Electronic Letters 27 November 2003 Vol. 39 No. 24
In this article the topic of optical filters using MEMS technology is discussed. The
authors have developed array of micro mirrors (64 mirrors in the array) that are tilted at
different angels using MEM actuators. This array of mirrors reflects the iricoming light
through a lens then off of a diffraction grating. Depending on the angle of these mirrors
(incidence of incoming light) the light reflected from the mirrors is attenuated or filtered
out. With these devices it is possible to achieve an attenuation resolution of about 14Ghz,
that corresponds to a line width of only 0.07nm. The ability to filter the frequency of
incoming light to such a degree of accuracy can be used in data communication. Systems
that use wave division multiplexing require high spectral efficiency, systems that can
manipulate spectral content on such a scale will allow for increased bandwidth in optical
fibers. These devices my also be important in various other applications where highly
coherent light is required. One of these applications may be high capacity DVD.
Currently DVD are only a few layers, in the future it may be possible to increase data
density on the disk by controlling the frequency content of the light being used to read
and write to the disk. This technology has may one day have applications in optical
computing as well.
